Silicon Nitride Powder Preparation
Saturday, July 11th, 2009Thermal Decomposition of Silicon Imide or Amide
In this process first SiCl4 is reacted with ammonia gas at a temperature range of -30.C to 70.C so as to produce silicon imide, tetramide monosilane and other related compounds. The formed materials converted to silicon nitride in special furnace at a temperature of 1600.C under nitrogen or ammonia […]
