Vapour phase reaction of Silicon Halides with Ammonia
This method is used for producing sinterable silicon nitride powder with very high alpha phase content. In this process vapour phase ammonolysis of SiCl4 is carried out under diluted nitrogen atmosphere the temperature range of 1100 to 1300.C. The reaction may be given us as follows:
3SiCl4 + 4NH3 Si3N4 + 12HCl
To improve the quality and yield of pure silicon nitride powder we need to maintain the feed rate of SiCl4 and ammonia gas.
To be contd…..
